cyclopentadienyl-propylcyclopentadienylruthenium
释义
名词noun
- 1(organic chemistry) A ruthenium-based organometallic compound used in chemical vapor deposition to form thin ruthenium films. It has a Ru center bound to two cyclopentadienyl ligands, one carrying a propyl group, and is valued for efficient deposition rates but can struggle to form uniform films on oxide surfaces.